{"id":439742,"date":"2024-10-20T08:10:51","date_gmt":"2024-10-20T08:10:51","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/asme-b5-64-2022\/"},"modified":"2024-10-26T15:18:52","modified_gmt":"2024-10-26T15:18:52","slug":"asme-b5-64-2022","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/asme\/asme-b5-64-2022\/","title":{"rendered":"ASME B5.64 2022"},"content":{"rendered":"

This Standard establishes a methodology for specifying and testing the performance of single-axis linear positioning systems. It covers linear positioning systems with travels ranging from micrometers to meters. This Standard describes equivalent test methods and instrumentation described in existing machine tool standards (ASME B5.54, ASME B5.57, and ISO 230 series) and additional methods and instrumentation used for the characterization of positioning systems having a relatively high positioning performance when compared to standard machine tool performance. This Standard seeks to highlight the importance of understanding measurement uncertainty and the test uncertainty ratio (TUR) by providing methods for estimating the test uncertainty and the uncertainty of positioning performance results. In addition to clarifying the positioning performance evaluation, this Standard facilitates performance comparisons between systems by unifying terminology and the treatments of environmental effects and measurement uncertainty. This Standard provides a series of tests that should be used to perform acceptance testing of new and reconditioned positioning systems and could be used to verify the continued capability of systems, already in operation, through periodic testing. The set of acceptance tests and the specification limits for system conformance shall be the subject of contractual agreement between the user and the manufacturer\/supplier.<\/p>\n

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PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
4<\/td>\nCONTENTS <\/td>\n<\/tr>\n
9<\/td>\nForeword <\/td>\n<\/tr>\n
10<\/td>\nASME B5 COMMITTEE ROSTER <\/td>\n<\/tr>\n
11<\/td>\nCORRESPONDENCE WITH THE B5 COMMITTEE <\/td>\n<\/tr>\n
14<\/td>\nSection 1 Scope
1-1 SCOPE <\/td>\n<\/tr>\n
15<\/td>\nSection 2 References
2-1 NORMATIVE REFERENCES
2-2 INFORMATIVE REFERENCES <\/td>\n<\/tr>\n
18<\/td>\nSection 3 Nomenclature
3-1 NOMENCLATURE
3-1.1 General <\/td>\n<\/tr>\n
22<\/td>\n3-1.2 Symbols and Units of Measure <\/td>\n<\/tr>\n
23<\/td>\n3-1.3 Acronyms <\/td>\n<\/tr>\n
24<\/td>\nSection 4 Definitions
4-1 INTRODUCTION
4-2 TERMS AND DEFINITONS <\/td>\n<\/tr>\n
36<\/td>\nSection 5 Measurement Points, Coordinate Systems, and System Positioning Errors
5-1 INTRODUCTION
5-2 MEASUREMENT POINT
Figures
Figure 5-2-1 Measurement Point (MP) <\/td>\n<\/tr>\n
37<\/td>\n5-3 CARRIAGE AND BASE COORDINATE SYSTEMS
Figure 5-3-1 Right-Handed Coordinate System Showing Directionality of Motion
Figure 5-3-2 Motion of the Functional Point (FP) With Respect to the Frame Coordinate System (csF) <\/td>\n<\/tr>\n
38<\/td>\n5-4 CARRIAGE ORIGIN POINT
5-5 SYSTEM POSITIONING ERROR MOTION NOMENCLATURE
Figure 5-5-1 Error Motions of a Single-Axis Linear Positioning System Designed to Traverse Along the X-Axis <\/td>\n<\/tr>\n
39<\/td>\n5-6 MEASUREMENT POINT TRANSFORMATIONS <\/td>\n<\/tr>\n
40<\/td>\nSection 6 Environmental Specifications
6-1 GENERAL
6-2 TEMPERATURE
6-2.1 General
6-2.2 Thermal Environment Guidelines
6-2.3 Time Variations <\/td>\n<\/tr>\n
41<\/td>\n6-2.4 Thermal Radiant Energy
6-3 AIR HUMIDITY
6-3.1 General
6-3.2 Responsibilities
6-3.3 Specifications
6-4 BAROMETRIC PRESSURE
6-4.1 General
6-4.2 Responsibilities
6-4.3 Specifications
6-5 BASE VIBRATION
6-5.1 General <\/td>\n<\/tr>\n
42<\/td>\n6-5.2 Responsibilities
6-5.3 Base Vibrational Parameters
6-6 ELECTRICAL
6-6.1 General
6-6.2 Responsibilities
6-6.3 Electrical Parameters
6-7 UTILITY AIR
6-7.1 General
6-7.2 Responsibilities <\/td>\n<\/tr>\n
43<\/td>\n6-7.3 Specifications <\/td>\n<\/tr>\n
44<\/td>\nSection 7 Positioning Performance
7-1 GENERAL
7-2 IN-POSITION JITTER TEST
7-2.1 General
7-2.2 General Measurement Setup <\/td>\n<\/tr>\n
45<\/td>\nFigure 7-2.2.2-1 Example Measurement Setup for In-Position Jitter Test in the Z-Direction at Point (dx, dy, dz) <\/td>\n<\/tr>\n
46<\/td>\n7-2.3 Measurement Procedure
7-2.4 Data Analysis
7-2.5 Uncertainty Analysis <\/td>\n<\/tr>\n
47<\/td>\n7-2.6 Presentation of Results
7-3 MOVE-AND-SETTLE TEST
7-3.1 General
7-3.2 Measurement Setup
7-3.3 Measurement Procedure <\/td>\n<\/tr>\n
48<\/td>\nFigure 7-2.6-1 Example of an In-Position Jitter Test Report <\/td>\n<\/tr>\n
49<\/td>\n7-3.4 Data Analysis <\/td>\n<\/tr>\n
50<\/td>\nFigure 7-3.4.2-1 Example Moving Average Error, Calculated With a Process Window Time of 50 ms <\/td>\n<\/tr>\n
51<\/td>\nFigure 7-3.4.2-2 Example Moving Standard Deviation, Calculated With a Process Window Time of 50 ms <\/td>\n<\/tr>\n
52<\/td>\nFigure 7-3.4.2-3 Example Moving Peak Error, Calculated With a Process Window Time of 50 ms <\/td>\n<\/tr>\n
53<\/td>\n7-3.5 Test Uncertainty Analysis
7-3.6 Presentation of Results
7-4 INCREMENTAL STEP TEST AND MINIMUM INCREMENTAL MOTION TEST
7-4.1 General
7-4.2 General Measurement Setup
Tables
Table 7-3.4.3-1 Move-and-Settle Times for Various Metrics Using a Settling Criteria of 0.05 \u03bcm for a Process Window Time of 50 ms <\/td>\n<\/tr>\n
54<\/td>\nFigure 7-3.5-1 Moving Average Error for Multiple Move-and-Settle Tests <\/td>\n<\/tr>\n
55<\/td>\nFigure 7-3.6-1 Example of a Move-and-Settle Test Report <\/td>\n<\/tr>\n
56<\/td>\n7-4.3 Incremental Step Test
Figure 7-4.3.1-1 Example Displacement Vs. Time Plot for an Incremental Step Test With a 2.5 nm Commanded Step Size <\/td>\n<\/tr>\n
57<\/td>\nFigure 7-4.3.1-2 Illustration of Move-and-Settle Time, tms, and Average Time, tave <\/td>\n<\/tr>\n
59<\/td>\n7-4.4 Incremental Step Reversal Error
Figure 7-4.4-1 Successively Decreasing Steps Used to Measure the Incremental Step Reversal Error <\/td>\n<\/tr>\n
60<\/td>\n7-4.5 Minimum Incremental Motion
7-4.6 Test Uncertainty Analysis
7-4.7 Presentation of Results
7-5 STATIC POSITIONING ACCURACY AND REPEATABILITY
7-5.1 Modes of Operation <\/td>\n<\/tr>\n
61<\/td>\nFigure 7-4.7-1 Example of an Incremental Step Test and Minimum Incremental Motion Test Report <\/td>\n<\/tr>\n
62<\/td>\n7-5.2 Measurement Setup <\/td>\n<\/tr>\n
63<\/td>\n7-5.3 Measurement Procedure
Figure 7-5.2.3-1 Illustration of Travel Range and Measurement Range <\/td>\n<\/tr>\n
64<\/td>\n7-5.4 Data Analysis
Figure 7-5.3-1 Example Test Cycle Having m = 10 Points Measured Bidirectionally 5 Times, 5 per Direction and Each Endpoint Measured Unidirectionally 5 Times <\/td>\n<\/tr>\n
66<\/td>\nFigure 7-5.4.4-1 Abbe Error for Both Pitch Angle, \u03b1ij, and Yaw Angle, \u03b2ij, for the Case of Measuring With an Interferometer <\/td>\n<\/tr>\n
67<\/td>\nFigure 7-5.4.5-1 Examples of Measurement Data With Different Normalizations <\/td>\n<\/tr>\n
68<\/td>\n7-5.5 Calculation of the Static Positioning Error, Reversal Error, Repeatability and Accuracy <\/td>\n<\/tr>\n
70<\/td>\n7-5.6 Stroke of Axis
7-5.7 Nomenclature for Performance Metrics Calculated With Corrected Data <\/td>\n<\/tr>\n
71<\/td>\n7-5.8 Linearity and Hysteresis
Figure 7-5.5-1 Example Mean Bidirectional Positioning Error and Calculation Results <\/td>\n<\/tr>\n
72<\/td>\n7-5.9 Periodic Error of Linear Motion (Partial Travel) <\/td>\n<\/tr>\n
73<\/td>\nFigure 7-5.8-1 Plot of Linearly Corrected (via Endpoint Linear Normalization) Positioning Deviations Illustrating the Calculation of Linearity of the Axis <\/td>\n<\/tr>\n
74<\/td>\n7-5.10 Alternate Informative Methods
Figure 7-5.9.5-1 Plot of Calculated Positioning Deviations Illustrating the Periodic Error P of a Linear Axis <\/td>\n<\/tr>\n
75<\/td>\nFigure 7-5.10.1-1 Step Test Cycle <\/td>\n<\/tr>\n
76<\/td>\n7-5.11 Presentation of Results
7-6 CONSTANT VELOCITY AND ACCELERATION TEST
7-6.1 General
Table 7-5.10.2-1 First 40 Position Values Based on a Sobol Sequence Calculation <\/td>\n<\/tr>\n
77<\/td>\n7-6.2 Method for Defining Measurement Targets
7-6.3 Measurement Setup
Figure 7-5.10.3-1 Example of Position Data Corrected for Drift <\/td>\n<\/tr>\n
78<\/td>\nFigure 7-5.11-1 Example of a Static Positioning Error and Linearity Test Report <\/td>\n<\/tr>\n
81<\/td>\n7-6.4 Measurement Procedure
7-6.5 Data Analysis <\/td>\n<\/tr>\n
82<\/td>\nFigure 7-6.5.2-1 Example of a Velocity Profile for a Test Motion <\/td>\n<\/tr>\n
83<\/td>\nFigure 7-6.5.2-2 Example of Velocity Settling for a Test Motion <\/td>\n<\/tr>\n
86<\/td>\n7-7 DYNAMIC POSITIONING TESTS
7-7.1 General
7-7.2 Method for Defining Measurement Targets <\/td>\n<\/tr>\n
87<\/td>\nFigure 7-6.5.3-1 Example of a Constant Velocity and Acceleration Test Report for a Single Motion <\/td>\n<\/tr>\n
88<\/td>\nFigure 7-6.5.3-2 Example of Average Metrics for Constant Velocity and Acceleration Test Report <\/td>\n<\/tr>\n
89<\/td>\n7-7.3 Measurement Setup
Figure 7-7.3.1-1 Laser Interferometer Example Setup <\/td>\n<\/tr>\n
90<\/td>\n7-7.4 Measurement Procedure
7-7.5 Data Analysis <\/td>\n<\/tr>\n
91<\/td>\nFigure 7-7.5.1-1 Linear Ramp Motion General Characteristics
Figure 7-7.5.2-1 Example Linear Ramp Motion and Dynamic Positioning Deviation for Three Control Configurations <\/td>\n<\/tr>\n
92<\/td>\n7-7.6 Test Uncertainty Analysis
Figure 7-7.5.2-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Three Control Configurations for Linear Ramp Target Motion <\/td>\n<\/tr>\n
93<\/td>\nFigure 7-7.5.2-3 Zoomed-In Portion of Example Dynamic Positioning Deviation Near the Final Target Position After t = 0.2 s <\/td>\n<\/tr>\n
94<\/td>\nFigure 7-7.5.3-1 Sinusoidal Motion General Characteristics <\/td>\n<\/tr>\n
95<\/td>\nFigure 7-7.5.4-1 Example Sinusoidal Motion and Dynamic Positioning Deviation for Two Control Configurations
Figure 7-7.5.4-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Two Control Configurations for Sinusoidal Target Motion <\/td>\n<\/tr>\n
96<\/td>\nFigure 7-7.5.4-3 Example Sinusoidal Target Velocity and Target Acceleration for Two Control Configurations <\/td>\n<\/tr>\n
97<\/td>\n7-7.7 Presentation of Results <\/td>\n<\/tr>\n
98<\/td>\nFigure 7-7.7.1-1 Example of a Dynamic Positioning Test Report for a Linear Ramp Motion <\/td>\n<\/tr>\n
99<\/td>\nFigure 7-7.7.2-1 Example of a Dynamic Positioning Test Report for a Sinusoidal Motion <\/td>\n<\/tr>\n
101<\/td>\nFigure 7-7.7.2-2 Example of a Dynamic Velocity Test Report for a Sinusoidal Motion <\/td>\n<\/tr>\n
102<\/td>\nFigure 7-7.7.2-3 Example of a Dynamic Acceleration Test Report for a Sinusoidal Motion <\/td>\n<\/tr>\n
103<\/td>\nSection 8 Geometric Accuracy
8-1 STRAIGHTNESS ERRORS
8-1.1 General
8-1.2 Measurement Setup <\/td>\n<\/tr>\n
104<\/td>\nFigure 8-1.1-1 Straightness Error Motions, EYX and EZX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-1.2.2-1 Setups for Measuring Straightness Using a Displacement Sensor and a Straightedge With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement <\/td>\n<\/tr>\n
105<\/td>\n8-1.3 Measurement Setup
Figure 8-1.2.2-2 Setup for Measuring Straightness Using a Straightness Interferometer With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement <\/td>\n<\/tr>\n
106<\/td>\n8-1.4 Static Straightness Measurement Procedure <\/td>\n<\/tr>\n
107<\/td>\n8-1.5 Static Straightness Data Analysis
8-1.6 Presentation of Static Results
8-1.7 Dynamic Straightness Measurement Procedure <\/td>\n<\/tr>\n
108<\/td>\nFigure 8-1.6-1 Example of a Static Straightness Test Report <\/td>\n<\/tr>\n
109<\/td>\n8-1.8 Dynamic Straightness Data Analysis <\/td>\n<\/tr>\n
110<\/td>\n8-1.9 Presentation of Dynamic Results
8-2 ANGULAR ERRORS
8-2.1 General
8-2.2 Measurement Setup
8-2.3 Measurement Setup <\/td>\n<\/tr>\n
111<\/td>\nFigure 8-1.9-1 Example of a Dynamic Straightness Test Report <\/td>\n<\/tr>\n
112<\/td>\nFigure 8-2.1-1 Angular Error Motions, EAX, EBX, and ECX, of a Linear Positioning System Designed to Traverse in the X-Direction <\/td>\n<\/tr>\n
113<\/td>\n8-2.4 Static Angular Measurement Procedure
8-2.5 Static Angle Data Analysis <\/td>\n<\/tr>\n
114<\/td>\n8-2.6 Presentation of Static Results
8-2.7 Dynamic Angular Measurement Procedure <\/td>\n<\/tr>\n
115<\/td>\nFigure 8-2.6-1 Example of a Static Angular Error Test Report <\/td>\n<\/tr>\n
116<\/td>\n8-2.8 Dynamic Angle Data Analysis
8-2.9 Presentation of Dynamic Results <\/td>\n<\/tr>\n
117<\/td>\nFigure 8-2.9-1 Example of a Dynamic Angular Error Report <\/td>\n<\/tr>\n
118<\/td>\nSection 9 Point Repeatability Test
9-1 GENERAL
9-2 MEASUREMENT SETUP
9-2.1 General Measurement Setup
9-2.2 Equipment <\/td>\n<\/tr>\n
119<\/td>\n9-2.3 Functional Point(s), Target position(s), and Sensor Location
9-2.4 Setup Configuration <\/td>\n<\/tr>\n
120<\/td>\nFigure 9-2.3-1 The Four Possible Test Cases of the Point Repeatability Test Given the Options for Single or Multiple Functional Points and Target Positions <\/td>\n<\/tr>\n
121<\/td>\nFigure 9-2.4-1 Setup Configuration \u2014 Three-Sensor Nest
Figure 9-2.4-2 Setup Configuration \u2014 Single Sensor
Figure 9-2.4-3 Setup Configuration \u2014Two-Sensor Nest <\/td>\n<\/tr>\n
122<\/td>\n9-2.5 Measurement Approach Direction(s)
9-2.6 Minimum Displacement
9-2.7 Axial Sensor \u2014 Special Cases <\/td>\n<\/tr>\n
123<\/td>\n9-3 MEASUREMENT PROCEDURE
9-3.1 General Measurement Procedure
9-3.2 Number of Data Points and Sampling Rate
9-3.3 Data Collection Timing <\/td>\n<\/tr>\n
124<\/td>\n9-4 DATA ANALYSIS <\/td>\n<\/tr>\n
125<\/td>\n9-5 TEST UNCERTAINTY ANALYSIS
9-6 PRESENTATION OF RESULTS <\/td>\n<\/tr>\n
127<\/td>\nFigure 9-6-1 Example of a Point Repeatability Test Report for a Linear Positioning System <\/td>\n<\/tr>\n
128<\/td>\nSection 10 Servo Characterization
10-1 GENERAL
10-2 TECHNICAL BACKGROUND
10-2.1 Signals and Systems
10-2.2 Linearity and Time Invariance <\/td>\n<\/tr>\n
129<\/td>\n10-2.3 Frequency Response
Figure 10-2.3-1 Lumped-Parameter Model of a Mass-Spring-Damper System Driven by a Force <\/td>\n<\/tr>\n
130<\/td>\n10-2.4 Inputs and Outputs
10-2.5 Categorizing Frequency Responses
Figure 10-2.3-2 Frequency Response Plot for an Underdamped Mass-Spring-Damper System <\/td>\n<\/tr>\n
131<\/td>\nFigure 10-2.5.1-1 Basic Control Scheme Used by Many Single-Axis Positioning Systems <\/td>\n<\/tr>\n
132<\/td>\n10-3 FREQUENCY RESPONSE MEASUREMENTS
10-3.1 Equipment
10-3.2 Loop Transmission Measurement Procedure
Figure 10-3.2-1 Disturbance Signal, w, Injected Into a System Following the Control Algorithm but Before the Power Amplifier Stage <\/td>\n<\/tr>\n
133<\/td>\n10-4 STABILITY METRICS
10-5 PRESENTATION OF RESULTS
10-6 SUMMARY
Table 10-3.2-1 Dynamic Signal Analyzer Test Parameters to Be Specified <\/td>\n<\/tr>\n
134<\/td>\nFigure 10-4-1 Examples of the Measures on a Typical Loop Transmission Plot <\/td>\n<\/tr>\n
135<\/td>\nFigure 10-5-1 Example of a Measured Loop Transmission for a Linear Motion System
Figure 10-5-2 Corresponding Sensitivity Plot for a Measured Loop Transmission for a Linear Motion System <\/td>\n<\/tr>\n
136<\/td>\nTable 10-5-1 Values to Accompany a Typical Servomechanism Characterization Test <\/td>\n<\/tr>\n
137<\/td>\nSection 11 Test Equipment and Instrumentation
11-1 GENERAL <\/td>\n<\/tr>\n
138<\/td>\n11-2 EXISTING REFERENCES AND STANDARDS
11-3 LINEAR POSITION
11-3.1 Laser Interferometers
Table 11-3-1 Typical Position Sensor Characteristics <\/td>\n<\/tr>\n
139<\/td>\n11-3.2 Linear Encoders
11-3.3 Linear Variable Displacement Transformers
Figure 11-3.1-1 Generic Laser Interferometer Setup for Axial Position Measurement <\/td>\n<\/tr>\n
140<\/td>\n11-3.4 Capacitive Sensors
11-3.5 Eddy Current Sensors
Figure 11-3.2-1 Generic Linear Encoder Setup for Axial Position Measurement <\/td>\n<\/tr>\n
141<\/td>\n11-4 ANGLE
11-4.1 Laser Interferometers
Figure 11-3.3-1 LVDT Schematic for Axial Position Measurement <\/td>\n<\/tr>\n
142<\/td>\n11-4.2 Autocollimators
11-4.3 Electrolytic Inclinometers
Figure 11-4.1-1 Alternate Laser Interferometer Setups for Pitch or Yaw Angular Displacement Measurement
Table 11-4-1 Typical Angle Sensor Characteristics <\/td>\n<\/tr>\n
143<\/td>\n11-4.4 Servo Tiltmeters
11-4.5 MEMS Inclinometer
11-4.6 Position Sensing Detector Sensor
Figure 11-4.2-1 Autocollimator Setup for Angular Displacement Measurement <\/td>\n<\/tr>\n
144<\/td>\n11-5 TEMPERATURE
11-6 BAROMETRIC PRESSURE <\/td>\n<\/tr>\n
145<\/td>\n11-7 HUMIDITY
11-8 REFRACTIVE INDEX OF AIR
11-9 VIBRATION <\/td>\n<\/tr>\n
146<\/td>\n11-10 DATA ACQUISITION
11-10.1 Filters
11-10.2 Triggers
11-11 FIXTURING <\/td>\n<\/tr>\n
147<\/td>\nSection 12 Uncertainty
12-1 GENERAL
12-2 RATED OPERATING CONDITIONS
12-3 TEST CONDITIONS
12-4 MEASURAND AND UNCERTAINTY <\/td>\n<\/tr>\n
148<\/td>\n12-5 MEASUREMENT REPRODUCIBILITY
12-6 EXAMPLE SOURCES OF UNCERTAINTY
12-6.1 Reference Artifact
12-6.2 Misalignment of Measuring System (Cosine Error)
12-6.3 Temperature
12-6.4 Other Properties of Air <\/td>\n<\/tr>\n
149<\/td>\n12-6.5 Vibration
12-6.6 Resolution
12-6.7 Uncertainty of RMS Value <\/td>\n<\/tr>\n
150<\/td>\nMANDATORY APPENDIX I MEASUREMENT POINT TO FUNCTIONAL POINT ERROR TRANSFORMATION
I-1 GENERAL
I-2 DISPLACEMENT ERROR TRANSFORMATION (POSITION AND STRAIGHTNESS) <\/td>\n<\/tr>\n
151<\/td>\nI-3 PROPAGATION OF ERROR UNCERTAINTY <\/td>\n<\/tr>\n
152<\/td>\nFigure I-2-1 Relationship of Vectors Between Physically Related Points Under Consideration: oF (Reference Coordinate System), M and P (Carriage)
Figure I-2-2 Associated Coordinate Systems for Fixed Points oF, M, and P <\/td>\n<\/tr>\n
153<\/td>\nFigure I-2-3 Separation of Related Position Vectors Into System Nominal Positioning (X\u2192), Initial Offsets (MX\u2192), and Displacement Error Vectors (EM\u2192 and EP\u2192) (Combining Positioning and Straightness Deviations) <\/td>\n<\/tr>\n
154<\/td>\nMANDATORY APPENDIX II ISOLATED SENSOR CHECK
II-1 GENERAL
II-2 MEASUREMENT SETUP
II-2.1 Short-Range Displacement Sensors
II-2.2 Autocollimators
II-2.3 Laser Interferometry Systems <\/td>\n<\/tr>\n
155<\/td>\nFigure II-2.1-1 Schematics of Several Displacement Sensors With Capture Fixtures
II-3 MEASUREMENT PROCEDURE <\/td>\n<\/tr>\n
156<\/td>\nFigure II-2.3.1-1 Setup for Measuring Influence of Laser Interferometer Optics
Figure II-2.3.2-1 Setup for Measuring Influence of Laser Interferometer System <\/td>\n<\/tr>\n
157<\/td>\nMANDATORY APPENDIX III SPECIFICATIONS FOR OPERATING CONDITIONS AND PERFORMANCE
III-1 GENERAL
III-2 GENERAL SPECIFICATIONS FOR SINGLE-AXIS LINEAR POSITIONING SYSTEM
III-3 ENVIRONMENTAL SPECIFICATIONS FOR RATED OPERATING CONDITIONS
III-3.1 Temperature <\/td>\n<\/tr>\n
158<\/td>\nIII-3.2 Ambient Air
III-3.3 Electrical (Per Each Electrical Supply)
III-3.4 Ambient Vibration
III-3.5 Utility Air (if Applicable)
III-4 SPECIFICATIONS FOR MACHINE PERFORMANCE
III-4.1 General Test Conditions <\/td>\n<\/tr>\n
159<\/td>\nIII-4.2 In-Position Jitter Test (See Subsection 7-2)
III-4.3 Move and Settle Test (See Subsection 7-3)
III-4.4 Incremental Step Test and Minimum Incremental Motion Test (See Subsection 7-4)
III-4.5 Static Positioning Accuracy and Repeatability (See Subsection 7-5) <\/td>\n<\/tr>\n
160<\/td>\nIII-4.6 Constant Velocity and Acceleration Test (See Subsection 7-6)
III-4.7 Dynamic Positioning Accuracy Tests (See Subsection 7-7)
III-4.8 Straightness Errors (See Subsection 8-1) <\/td>\n<\/tr>\n
161<\/td>\nIII-4.9 Angular Errors (See Subsection 8-2)
III-4.10 Point Repeatability Test (See Section 9) <\/td>\n<\/tr>\n
162<\/td>\nIII-4.11 Servo Characterization (See Section 10) <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ASME<\/b><\/a><\/td>\n2022<\/td>\n165<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":439745,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2643],"product_tag":[],"class_list":{"0":"post-439742","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-asme","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/439742","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/439745"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=439742"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=439742"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=439742"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}