ASTM-F1709:2016 Edition

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F1709-97(2016) Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

Published By	Publication Date	Number of Pages
ASTM	2016	3

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ASTM F1709-97-Reapproved2016

Withdrawn Standard: Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

ASTM F1709

Scope

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Keywords

coating; sputtering; target; thin film; titanium ;

ICS Code

ICS Number Code 31.120 (Electronic display devices)

DOI: 10.1520/F1709-97R16


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Standard Title	F1709-97(2016) Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
Published Code	ASTM
Publication Date	2016
Pages Count	3

ASTM-F1709:2016 Edition

ASTM F1709-97-Reapproved2016

Withdrawn Standard: Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

ASTM F1709

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