{"id":359193,"date":"2024-10-20T01:24:56","date_gmt":"2024-10-20T01:24:56","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-iso-25178-6032013\/"},"modified":"2024-10-26T02:05:01","modified_gmt":"2024-10-26T02:05:01","slug":"bs-en-iso-25178-6032013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-iso-25178-6032013\/","title":{"rendered":"BS EN ISO 25178-603:2013"},"content":{"rendered":"

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
8<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\nSection sec_1
Section sec_2
Section sec_2.1
Section sec_2.1.1
Section sec_2.1.2
1\tScope
2\tTerms and definitions
2.1\tTerms and definitions related to all areal surface texture measurement methods <\/td>\n<\/tr>\n
10<\/td>\nTable tab_a
Figure fig_1
Section sec_2.1.3
Section sec_2.1.4
Section sec_2.1.5 <\/td>\n<\/tr>\n
11<\/td>\nSection sec_2.1.6
Section sec_2.1.7
Table tab_b
Figure fig_2
Section sec_2.1.8 <\/td>\n<\/tr>\n
12<\/td>\nTable tab_c
Figure fig_3
Section sec_2.1.9
Section sec_2.1.10 <\/td>\n<\/tr>\n
13<\/td>\nSection sec_2.1.11
Section sec_2.1.12
Section sec_2.1.13
Section sec_2.1.14
Section sec_2.1.15
Section sec_2.1.16 <\/td>\n<\/tr>\n
14<\/td>\nFigure fig_4 <\/td>\n<\/tr>\n
15<\/td>\nSection sec_2.1.17
Section sec_2.1.18
Section sec_2.1.19
Section sec_2.1.20
Section sec_2.1.21 <\/td>\n<\/tr>\n
16<\/td>\nTable tab_1
Section sec_2.2
Section sec_2.2.1
Section sec_2.2.2
2.2\tTerms and definitions related to x- and y-scanning systems <\/td>\n<\/tr>\n
17<\/td>\nTable tab_2
Section sec_2.2.3
Section sec_2.2.4
Section sec_2.2.5
Section sec_2.2.6
Section sec_2.2.7 <\/td>\n<\/tr>\n
18<\/td>\nSection sec_2.2.8
Section sec_2.3
Section sec_2.3.1
Section sec_2.3.2
Section sec_2.3.3
Section sec_2.3.4
Section sec_2.3.5
2.3\tTerms and definitions related to optical systems <\/td>\n<\/tr>\n
19<\/td>\nTable tab_d
Figure fig_5
Section sec_2.3.6
Section sec_2.3.7
Section sec_2.3.8 <\/td>\n<\/tr>\n
20<\/td>\nSection sec_2.4
Section sec_2.4.1
Section sec_2.4.2
Section sec_2.4.3
Section sec_2.4.4
Section sec_2.4.5
Section sec_2.4.6
Section sec_2.5
Section sec_2.5.1
2.4\tTerms and definitions related to optical properties of the workpiece
2.5\tTerms and definitions specific to phase-shifting interferometric microscopy <\/td>\n<\/tr>\n
21<\/td>\nSection sec_2.5.2
Section sec_2.5.3
Section sec_2.5.4
Section sec_2.5.5
Section sec_3
Section sec_3.1
3\tDescriptions of the influence quantities
3.1\tGeneral <\/td>\n<\/tr>\n
22<\/td>\nSection sec_3.2
Table tab_3
3.2\tInfluence quantities <\/td>\n<\/tr>\n
24<\/td>\nAnnex sec_A
Annex sec_A.1
Annex sec_A.2
Annex sec_A.3
Annex\u00a0A
\n(informative)<\/p>\n

Components of a phase-shifting interferometric (PSI) microscope <\/td>\n<\/tr>\n

25<\/td>\nAnnex sec_B
Annex\u00a0B
\n(informative)<\/p>\n

Phase-shifting interferometric (PSI) microscope \u2014 Theory of operation <\/td>\n<\/tr>\n

26<\/td>\nTable tab_e
Figure fig_B.1 <\/td>\n<\/tr>\n
27<\/td>\nTable tab_f
Figure fig_B.2
Table tab_g
Figure fig_B.3 <\/td>\n<\/tr>\n
28<\/td>\nFigure fig_B.4 <\/td>\n<\/tr>\n
29<\/td>\nFigure fig_B.5 <\/td>\n<\/tr>\n
30<\/td>\nAnnex sec_C
Annex sec_C.1
Annex sec_C.2
Figure fig_C.1
Annex\u00a0C
\n(informative)<\/p>\n

Errors and corrections for phase-shifting interferometric (PSI) microscopes <\/td>\n<\/tr>\n

31<\/td>\nFigure fig_C.2
Annex sec_C.3
Annex sec_C.4
Annex sec_C.5 <\/td>\n<\/tr>\n
32<\/td>\nAnnex sec_C.6
Annex sec_C.7
Annex sec_C.8
Annex sec_C.9
Annex sec_C.10
Annex sec_C.11
Annex sec_C.12 <\/td>\n<\/tr>\n
33<\/td>\nAnnex sec_D
Annex sec_D.1
Annex sec_D.2
Table tab_D.1
Annex\u00a0D
\n(informative)<\/p>\n

Relation to the GPS matrix model <\/td>\n<\/tr>\n

34<\/td>\nAnnex sec_D.3 <\/td>\n<\/tr>\n
35<\/td>\nReference ref_1
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Bibliography <\/td>\n<\/tr>\n
36<\/td>\nReference ref_22
Reference ref_23
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Reference ref_28
Reference ref_29
Reference ref_30 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2013<\/td>\n40<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":359202,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[255,2641],"product_tag":[],"class_list":{"0":"post-359193","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-17-040-20","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/359193","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/359202"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=359193"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=359193"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=359193"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}