{"id":291009,"date":"2024-10-19T19:45:16","date_gmt":"2024-10-19T19:45:16","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-175602014\/"},"modified":"2024-10-25T16:46:29","modified_gmt":"2024-10-25T16:46:29","slug":"bs-iso-175602014","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-175602014\/","title":{"rendered":"BS ISO 17560:2014"},"content":{"rendered":"

This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration. This method is applicable to single-crystal, poly-crystal, or amorphous silicon specimens with boron atomic concentrations between 1 \u00d7 1016<\/sup> atoms\/cm3<\/sup> and 1 \u00d7 1020<\/sup> atoms\/cm3<\/sup>, and to crater depths of 50 nm or deeper.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\nSection sec_1
Section sec_2
Section sec_3
1\tScope
2\tNormative reference
3\tSymbols and abbreviations <\/td>\n<\/tr>\n
10<\/td>\nSection sec_4
Section sec_5
Section sec_5.1
Section sec_5.2
Section sec_6
Section sec_6.1
Section sec_6.2
4\tPrinciple
5\tReference materials
5.1\tReference materials for determination of relative-sensitivity factors
5.2\tReference materials for calibration of depth scale
6\tApparatus
6.1\tSecondary-ion mass spectrometer
6.2\tStylus profilometer <\/td>\n<\/tr>\n
11<\/td>\nSection sec_6.3
Section sec_7
Section sec_8
Section sec_8.1
Section sec_8.1.1
Table tab_1
Table tab_2
Section sec_8.1.2
Section sec_8.2
Section sec_8.2.1
Section sec_8.2.2
Section sec_8.2.3
6.3\tOptical interferometer
7\tSpecimen
8\tProcedure
8.1\tAdjustment of secondary-ion mass spectrometer
8.2\tOptimizing the secondary-ion mass spectrometer settings <\/td>\n<\/tr>\n
12<\/td>\nSection sec_8.3
Section sec_8.4
Section sec_8.4.1
Section sec_8.4.2
Section sec_8.5
Section sec_8.5.1
Section sec_8.5.2
Section sec_8.5.3
8.3\tSpecimen introduction
8.4\tDetected ions
8.5\tMeasurement of test specimen <\/td>\n<\/tr>\n
13<\/td>\nSection sec_8.6
Section sec_8.6.1
Section sec_8.6.2
Section sec_8.6.2.1
Section sec_8.6.2.2
Section sec_8.6.3
Section sec_8.6.3.1
Section sec_8.6.3.2
Figure fig_1
Section sec_8.6.3.3
8.6\tCalibration <\/td>\n<\/tr>\n
14<\/td>\nSection sec_9
Section sec_9.1
Section sec_9.2
Section sec_9.3
Section sec_9.4
Section sec_9.5
Section sec_9.6
9\tExpression of results <\/td>\n<\/tr>\n
15<\/td>\nSection sec_10
10\tTest report <\/td>\n<\/tr>\n
16<\/td>\nAnnex sec_A
Annex sec_A.1
Annex sec_A.2
Annex sec_A.3
Annex sec_A.4
Annex sec_A.5
Annex sec_A.5.1
Annex sec_A.5.2
Annex\u00a0A
\n(informative)<\/p>\n

Statistical report of stylus profilometry measurements <\/td>\n<\/tr>\n

17<\/td>\nAnnex sec_A.6
Table tab_A.1 <\/td>\n<\/tr>\n
18<\/td>\nReference ref_1
Reference ref_2
Reference ref_3
Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2014<\/td>\n22<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":291014,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-291009","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/291009","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/291014"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=291009"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=291009"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=291009"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}