ISO/TR 19319:2013

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Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Published By	Publication Date	Number of Pages
ISO	2013-03	124

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Categories: 71.040.40 - Chemical analysis, ISO

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Description

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2013-03
Pages Count	124
Language	English
Edition	2
File Size	9.1 MB
ICS Codes	71.040.40 - Chemical analysis

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ISO/TR 19319:2013

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