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BS ISO 24688:2022

BS ISO 24688:2022

$102.76

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

Published By Publication Date Number of Pages
BSI 2022 18
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PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
4 Substrate conditions
5 Testing of modulation period
5.1 Principle for low-angle X-ray methods
5.1.1 General
5.1.2 XRR method
10 5.1.3 GIXRD method
11 5.1.4 Calculating formula
12 5.2 Specifications concerning the coated sample
5.2.1 Size specifications for the coated sample
5.2.2 Periods specifications for the coated sample
5.2.3 Surface roughness requirements of the coated sample
13 5.3 Specifications for X-ray measuring apparatus
5.3.1 Apparatus configuration
5.3.2 Beam conversion device
5.3.3 Radiation sources and filters
5.4 Calibrating of apparatus
14 5.5 Testing conditions
5.6 Test and calculation procedure
15 Annex A (informative) Process of determination of modulation period by XRR

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BS ISO 24688:2022
$102.76