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BS ISO 23216:2021

BS ISO 23216:2021

$102.76

Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Published By Publication Date Number of Pages
BSI 2021 16
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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n–k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
4 Test specimen preparation
10 5 Apparatus
6 Procedure
6.1 Treatment of specimen before test
6.2 Preparation for test
6.3 Testing conditions for test
11 6.4 Optical model for analysis
6.5 Number of test repeats
7 Classification of test results
8 Test report
13 Annex A (normative) Classification method for amorphous carbon films by optical properties
15 Bibliography

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BS ISO 23216:2021
$102.76