BS ISO 11505:2012:2013 Edition
$167.15
Surface chemical analysis. General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
| Published By | Publication Date | Number of Pages |
| BSI | 2013 | 42 |
This International Standard describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
NOTE Any individual standard for a test material will have to specify a scope of a thickness of the surface layer as well as analyte elements, and include results of interlaboratory tests for validation of the methods.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Section sec_1 Section sec_2 Section sec_3 Section sec_4 Section sec_4.1 Section sec_4.1.1 1 Scope 2 Normative references 3 Principle 4 Apparatus 4.1 Glow discharge optical emission spectrometer |
| 8 | Section sec_4.1.2 Section sec_4.1.3 Section sec_4.1.3.1 Section sec_4.1.3.2 |
| 9 | Section sec_4.1.3.3 Section sec_5 Section sec_5.1 5 Adjusting the glow discharge spectrometer system settings 5.1 General |
| 10 | Section sec_5.2 Section sec_5.2.1 Section sec_5.2.1.1 Section sec_5.2.1.2 Section sec_5.2.1.3 5.2 Setting the discharge parameters of a DC source |
| 11 | Section sec_5.2.1.4 Section sec_5.2.2 Section sec_5.2.2.1 |
| 12 | Section sec_5.3 Section sec_5.3.1 Section sec_5.3.2 Section sec_5.3.3 5.3 Setting the discharge parameters of an RF source |
| 13 | Section sec_5.4 Section sec_5.4.1 Section sec_5.4.2 Section sec_5.4.3 Section sec_5.4.3.1 Section sec_5.4.3.2 5.4 Minimum performance requirements |
| 14 | Section sec_5.4.3.3 |
| 15 | Section sec_6 Section sec_7 Section sec_7.1 Section sec_7.2 Section sec_7.2.1 6 Sampling 7 Calibration 7.1 General 7.2 Calibration specimens |
| 16 | Section sec_7.2.2 Section sec_7.2.3 Section sec_7.2.4 Section sec_7.2.5 Section sec_7.2.6 Section sec_7.2.7 |
| 17 | Section sec_7.2.8 Section sec_7.3 Section sec_7.4 7.3 Validation specimens 7.4 Determination of the sputtering rate of calibration and validation specimens |
| 18 | Section sec_7.5 Section sec_7.6 Section sec_7.7 Section sec_7.7.1 7.5 Emission intensity measurements of calibration specimens 7.6 Calculation of calibration equations 7.7 Validation of the calibration |
| 19 | Section sec_7.7.2 Section sec_7.7.3 Section sec_7.8 7.8 Verification and drift correction |
| 20 | Section sec_8 Section sec_8.1 Section sec_8.2 Section sec_8.3 8 Analysis of test specimens 8.1 Adjusting discharge parameters 8.2 Setting of measuring time and data acquisition rate 8.3 Quantifying depth profiles of test specimens |
| 21 | Section sec_9 Section sec_9.1 Table tab_c Figure fig_1 Section sec_9.2 Section sec_9.2.1 9 Expression of results 9.1 Expression of quantitative depth profile 9.2 Determination of total coating mass per unit area |
| 22 | Section sec_9.2.2 Section sec_9.3 Section sec_10 Section sec_11 9.3 Determination of average mass fractions 10 Precision 11 Test report |
| 23 | Annex sec_A Annex sec_A.1 Annex sec_A.2 Annex sec_A.2.1 Annex A (normative) Calculation of calibration constants and quantitative evaluation of depth profiles |
| 25 | Annex sec_A.2.2 Annex sec_A.2.3 |
| 26 | Annex sec_A.3 |
| 27 | Annex sec_A.4 |
| 28 | Annex sec_A.5 Annex sec_A.5.1 |
| 29 | Annex sec_A.5.2 Annex sec_A.5.3 |
| 30 | Annex sec_A.5.4 Annex sec_A.6 Annex sec_A.6.1 Annex sec_A.6.2 |
| 31 | Annex sec_A.6.3 Annex sec_A.7 Annex sec_A.7.1 |
| 32 | Annex sec_A.7.2 Annex sec_A.7.3 |
| 33 | Annex sec_A.8 Annex sec_A.8.1 |
| 34 | Annex sec_A.8.2 Annex sec_A.8.3 |
| 35 | Annex sec_A.9 Annex sec_A.9.1 Annex sec_A.9.2 |
| 36 | Annex sec_A.9.3 |
| 37 | Annex sec_B Annex B (informative) Suggested spectral lines for determination of given elements |
| 39 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Reference ref_18 Reference ref_19 Reference ref_20 Bibliography |
