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BS EN ISO 14644-3:2019:2020 Edition

BS EN ISO 14644-3:2019:2020 Edition

$198.66

Cleanrooms and associated controlled environments – Test methods

Published By Publication Date Number of Pages
BSI 2020 62
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This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.

The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.

For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.

NOTE

This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.

PDF Catalog

PDF Pages PDF Title
2 undefined
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
3.1 General terms
11 3.2 Terms related to airborne particles
3.3 Terms related to air filters and systems
12 3.4 Terms related to airflow and other physical states
13 3.5 Terms related to electrostatic measurement
3.6 Terms related to measuring apparatus and measuring conditions
14 3.7 Terms related to occupancy states
4 Test procedures
4.1 Cleanroom tests
4.1.1 General
15 4.1.2 Supporting tests
4.2 Principle
4.2.1 Air pressure difference test
4.2.2 Airflow test
16 4.2.3 Airflow direction test and visualization
4.2.4 Recovery test
4.2.5 Temperature test
4.2.6 Humidity test
4.2.7 Installed filter system leakage tests
4.2.8 Containment leak test
4.2.9 Electrostatic and ion generator tests
4.2.10 Particle deposition test
17 4.2.11 Segregation test
5 Test reports
18 Annex A (informative) Choice of supporting tests and checklist
22 Annex B (informative) Supporting test methods
51 Annex C (informative) Test apparatus
59 Bibliography

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BS EN ISO 14644-3:2019
$198.66