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BS EN 62415:2010

BS EN 62415:2010

$86.31

Semiconductor devices. Constant current electromigration test

Published By Publication Date Number of Pages
BSI 2010 14
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This standard describes a method for conventional constant current electromigration testing of metal lines, via string and contacts.

PDF Catalog

PDF Pages PDF Title
5 English
CONTENTS
6 1 Scope
2 Symbols, terms and definitions
2.1 Symbols
2.2 Terms and definitions
7 3 Background
4 Sample size
5 Test structures
5.1 Lines
Figures
Figure 1 – TEG of electromigration evaluation for metal line
8 5.2 Via chains
5.3 Contact chains
6 Test conditions
Figure 2 – TEG of electromigration evaluation for vias
9 7 Failure criteria
8 Data analysis
Figure 3 – Graph fitted lognormal distribution
10 Figure 4 – Estimate procedure of current density exponent
11 Figure 5 – Estimation procedure of activation energy
12 Bibliography

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BS EN 62415:2010
$86.31