ASTM-E986 2004

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E986-04 Standard Practice for Scanning Electron Microscope Beam Size Characterization

Published By	Publication Date	Number of Pages
ASTM	2004	3

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Category: ASTM

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Description

1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors, some of which are electron beam voltage and current, lens aberrations, contrast in the specimen, and operator-instrument-material interaction. However, the resolution for any set of conditions is limited by the size of the electron beam. This size can be quantified through the measurement of an effective apparent edge sharpness for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces, for example, Y -deflection waveform generation, for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 50 000 x. Higher magnifications may be attempted, but difficulty in making precise measurements can be expected.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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PDF Pages	PDF Title
1	Scope Referenced Documents Terminology Significance and Use Suggested Materials Procedure
2	FIG. 1 FIG. 2
3	Precision and Bias Reproducibility Keywords FIG. 3