ASTM-E493 2011

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E493/E493M-11 Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

Published By	Publication Date	Number of Pages
ASTM	2011	3

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Category: ASTM

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Description

ASTM E493/E493M-11

Historical Standard: Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

ASTM E493/E493M

Scope

1.1 This practice covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 10⁻¹⁰ to 10⁻⁶ Pa m³/s (10⁻⁹ standard cm³/s to 10⁻⁵ standard cm³/s at 0°C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances.

1.2 Two test methods are described:

1.2.1 Test Method A—Test part preparation by bombing.

1.2.2 Test Method B—Test part preparation by prefilling.

1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

bell jar leak test; bomb mass spectrometer leak test; helium leak test; helium leak testing; leak testing; mass spectrometer leak testing; sealed object mass spectrometer leak test; Bell jar leak test; Bomb mass spectrometer leak test; Helium leak testing; Inside-out mode; Leak testing–mass spectrometer leak detector (MSLD); Mass spectrometer leak detector (MSLD); Probe methods; Sealed object mass spectrometer leak test

ICS Code

ICS Number Code 19.100 (Non-destructive testing)

DOI: 10.1520/E0493_E0493M-11

PDF Catalog

PDF Pages	PDF Title
1	Scope Referenced Documents Terminology Summary of Practice
2	Personnel Qualification Significance and Use Interferences Apparatus Materials Calibration Procedure
3	Keywords

Additional information

Standard Title	E493/E493M-11 Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
Published Code	ASTM
Publication Date	2011
Pages Count	3